Ms. Rachel Thorman, University of Iceland, presents:
In focused electron beam induced deposition (FEBID), a focused high energy electron beam is used to create three dimensional structures in the low nm size range. This is achieved by electron induced decompose of, often organometallic, precursor molecules at or close to the substrates surface. Due to the impact of the primary electron beam on the substrate, and later the deposit, low energy secondary electrons are emitted from the respective surfaces, both inside and outside the radius of the incident electron beam.[2] These LEEs are abundant[1] and their interactions with the precursor molecules plays an important role in FEBID. Two important candidate channels for LEE-induced molecular dissociation in FEBID are dissociative electron attachment (DEA) and dissociative ionization (DI). These processes likely contribute to adverse effects limiting the potential utilization of FEBID, such as deposit broadening and co-deposition of ligands and ligand fragments from the organometallic precursor molecules. The goal of the current research project is to perform a systematic study on the role of LEEs in precursor molecule dissociation in both the gas phase and the condensed phase, and thus distinguish the dominating processes for different molecular classes. Ultimately, this research looks to contribute to characterisation of novel organometallic compounds as potential FEBID precursors.
This talk will discuss recent DEA, DI, surface, and in-situ FEBID studies performed on one such organometallic compound, π-allyl ruthenium tricarbonyl bromide, and a comparison with FEBID of a similar ruthenium-centered metal carbonyl, triruthenium dodecacarbonyl. Ultimately, a suite of gas phase, surface, and in-situ FEBID studies will be performed on this molecule, as well as several other organometallic and metal carbonyl species, in order to elucidate the role of different low-energy electron induced processes in the FEBID nanofabrication process.
Acknowledgements: This work is supported by the Icelandic Research Fund (RANNÍS) and the University of Iceland Research Fund. This work was conducted within the framework of the COST Action CM1301 (CELINA).
REFERENCES
[1] S. Engmann, M. Stano, Ś. Matećik, and O. Ingólfsson. Phys. Chem. Chem. Phys. 14, (2012). 14611-14618.
[2] N. Silvis-Cividjian, C.W. Hagen, and P. Kruit. J. Appl. Phys. 98, (2005). 084905.